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北京时间2024年8月9日晚八点，iCANX Talks 第198期邀请到了明升中国app院上海微系统所研究员Tie Li，武汉大学教授Guoqiang Wu、上海微系统所研究员Lijuan Liang进行分享！此外，北京大学Haixia Zhang教授担任嘉宾，电子科技大学Xiaosheng Zhang教授担任主持人。

这将是一场汇聚顶尖学者的盛会，共同探讨前沿科技与学术挑战！更多精彩，敬请期待！

【嘉宾介绍】

李铁

上海微系统所

From MEMS to nano fabrication and nano sensors

【Abstract】

As origin of information in real world, high performance sensors are important not only to our human beings but also to smart robotics. Nano-structured materials have made it possible to form sensors at ultra-high performance. However, mass production at low cost is always desirable but not achieved in current time. In this talk, we will review our work of design and fabrication of nano structures in wafer level by MEMS technology, its integration with micro transducers and the corresponding high-performance nano sensors. With highly selective CMOS techniques, silicon nanowires (SiNWs) with narrow width (~20nm) were top-down fabricated on silicon-on-insulator (SOI) wafer, which is very useful to a simple, portable and rapid detection platform for bio/chemical detection. While, with the integration between micro-hotplate and nano-ordered sensing materials, gas sensor chips can be produced with high sensitivity, fast response time, and low power consumption. The proposed work represents a versatile approach for wide application of wafer-level fabricated sensors with high performance.

作为现实世界中的信息来源，高性能的传感器不仅对人类很重要，对智能机器人也很重要。纳米材料使制造超高性能的传感器成为可能。然而，低成本、大规模的传感器制造急需但远未实现。在本文中将综述我们通过MEMS技术在晶圆级设计和纳米制造方面的工作，以及实现微换能器和高性能纳米传感器的集成。利用高选择性的CMOS技术，在绝缘体上硅（SOI）晶片上我们采用自上而下的方法制造了小尺度（~20nm）的硅纳米线（SiNW），并进而实现了简单、便携、快速的生物/明升手机检测平台。同时，通过微热板和纳米有序传感材料的集成，生产出具有高灵敏度、快速响应时间和低功耗的气体传感器芯片。这些方法为未来高性能晶圆级纳米制造及纳米传感器的应用提供了一种通用方法。

【BIOGRAPHY】

Prof. Tie Li received his BS and PhD degrees from University of Science and Technology of China, Hefei, in 1992 and 1997, respectively. He then was a Post-doctor at Shanghai Institute of Microsystem and Information Technology. He was a visiting scholar at Delphi Research Labs for 18 months from 2002. He is currently a Professor in Shanghai Institute of Microsystem and Information Technology. He has published over 200 papers on Nano Letters、Small、Carbon、IEEE EDL etc., and owned 75 Chinese patents， 1 Japan Patent and 3 US Patent. His research interests include design, fabrication and application of Micro and Nano sensors.

李铁，博士，博士导师，明升中国app院上海微系统与信息技术研究所二级研究员，科技处处长，微系统技术重点实验室副主任，上海市东方英才领军人才，上海市优秀学术带头人。现任上海市传感技术学会副理事长、Transducers、IEEE MEMS国际会议TPC成员等职。承担国家重点研发计划课题、国家973、国防973、863、国家重大科技专项课题、国家创新研究群体app基金、国家自然app基金、明升中国app院项目等国家省部级项目80余项。在硅基热电器件及模组、硅纳米线制造及器件等方面开展系统研究并实现应用。在Nano Letters等发表论文200余篇，获明升中国发明专利75项、美国专利3项、日本专利1项。获国家技术发明二等奖、上海市技术发明一等奖/二等奖、上海市科技进步二等奖、美国汽车电子学会（SAE）Arch T. Colwell Merit 奖。被评为“明升中国app院优秀研究生导师”，指导的博士生获得“明升中国app院院长特别奖”和明升中国app院百篇优秀博士论文。